基于流量校准的吸附测量方法及误差分析

刘碧强,曹海山

Adsorption measurement method based on flow calibration and its error analysis

Biqiang LIU,Haishan CAO

图6 气体分配系统容积相对不确定度与校准腔容积的关系

Fig.6 Relationship between relative uncertainty of manifold volume and calibration chamber volume