基于流量校准的吸附测量方法及误差分析

刘碧强,曹海山

Adsorption measurement method based on flow calibration and its error analysis

Biqiang LIU,Haishan CAO

图7 气体分配系统容积相对不确定度极小值与校准腔容积的关系

Fig.7 Relationship between minimum relative uncertainty of manifold volume and calibration chamber volume