基于流量校准的吸附测量方法及误差分析
刘碧强,曹海山

Adsorption measurement method based on flow calibration and its error analysis
Biqiang LIU,Haishan CAO
表2 两种方法测量不确定度表达式参数
Table 2 Parameters of measurement uncertainty expression in both methods
A容积法基于流量校准的容积法
BilBil
Zp,T
VMp1,p2,p3,Z1,Z2,Z3,T1,Vcal8p1,p4,Z1,Z4,T1,mVM,?He6
VSp1,p4,Z1,Z4,VM5p4,Z4,T1,mS,He4
Teffp1,p5,Z1,Z5,Zeff,T1,VM,VS8p5,Zeff,mT,He,VS4
xadsp6,p7,p8,Z6,Z7,Zeff,ads,T1,VM,VS,Teff10p8,Zeff,ads,mads,VS,Teff5