Abstract:

Process simulation of synthesis and separation of trichlorosilane is realized by ChemCAD，based on the design data of 7000t/a trichlorosilane. The treatment of the exhaust gas from trichlorosilane synthesis has been improved by simulation result. In original condition，waste gas is separated from synthesis gas cryogenically，and then piped into waste deposal system；while in new condition，cryogenic gas in original condition is further compressed and separated cryogenically. The exhaust gas emission is reduced by about 8%，which make the process more favorite in both environment and economy.