关键词:

磁控溅射法, 杂化材料, 表面形貌, 紫外吸收, 表面结构, 接触角

Abstract:

In this paper, FC/ZnO hybrid materials were prepared by radio frequency(RF)sputtering.At the first step, fluorocarbon films were deposited by RF sputtering polytetrafluoroethylene (PTFE) target on polyethylene terephthalate (PET) substrate.Argon was used as the working gas.And then, zinc oxide (ZnO) films were deposited by RF sputtering zinc target on fluorocarbon films.Argon was also used as the working gas and oxygen was used as the reacting gas.So hybrid FC/ZnO materials were obtained.Hybrid FC/ZnO materials were characterized by means of AFM, XPS,UV and static contact angle.It was found that the obtained hybrid films were islands-structure composed of nanometer particles.The surface of islands was not flat.The growth mode of composite films was deposition and expansion.The hybrid films exhibited intense ultraviolet absorption due to π-π-conjugated double bonds, surface roughness and absorption ofultraviolet light by ZnO particles.The contact angle of the hybrid films was larger than 90°, exhibiting excellent water-repellent properties.

Key words:

磁控溅射法, 杂化材料, 表面形貌, 紫外吸收, 表面结构, 接触角