CIESC Journal

• 化工学报 • 上一篇    下一篇

微探针电化学加工机理及针尖尺寸控制技术

胡小唐,郭育,刘安伟,吉贵军   

  1. 天津大学精密仪器工程系!天津300072,天津大学精密仪器工程系!天津300072,天津大学精密仪器工程系!天津300072,天津大学精密仪器工程系!天津300072
  • 出版日期:1995-10-25 发布日期:1995-10-25

MECHANISM OF MICRO-TIP ELECTROCHEMICAL ETCHING AND TIP RADIUS CONTROL TECHNIQUE

Hu Xiaotang, Guo Yu, Liu Anwei and Ji Guijun(Department oj Precision Instrument Engineering ,Tianjin University,Tianjin 300072)   

  • Online:1995-10-25 Published:1995-10-25

摘要: 研究了电化学腐蚀法加工微探针的机理,建立了微探针成形的理论模型,提出实时控制加工微探针针尖曲率半径的新方法,发展了相应的控制加工技术。

Abstract: The microtip is the key part with which Scanning Probe Microscopy is used to measure and machine on the scale of atom. It is also oxidation damageable in a short time. So it is very important to develop a convenient and efficient fabricating technique for the microtip.In this paper, a theoretical model according to which the microtip takes shape is proposed on the basis of the electrochemical etching proess. The formation of the tip is ascribed to electrochemical etching and drawing force. When the stress on the tungsten filament is greater than its limiting stress,the tungsten filament breaks off and the tip is formed. At this moment,the electrolytic current is decreased suddenly. Thereby the electrolytic current is cut off automatically just at the moment when the tip is formed. In addition,by delaying the "cut of" time,the radius of the tip can be controlled. A related tip radius control technique is developed.

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