不同处理腔电极结构的高频电磁阻垢效果对比

熊兰, 苗雪飞, 伍懿美, 陈加鹏, 谢子杰

Anti-scaling effect comparison of high-frequency electromagnetic pulses stimulation in processing chambers with different electrodes

XIONG Lan, MIAO Xuefei, WU Yimei, CHEN Jiapeng, XIE Zijie

化工学报 . 2012, (10): 3220 -3224 . DOI: 10.3969/j.issn.0438-1157.2012.10.031