流化床化学气相沉积法制备近化学计量比的TiN粉体

桑元, 向茂乔, 宋淼, 朱庆山

Preparation of nearly-stoichiometric TiN powder by chemical vapor deposition in fluidized-bed

Yuan SANG, Maoqiao XIANG, Miao SONG, Qingshan ZHU

化工学报 . 2020, (6): 2743 -2751 . DOI: 10.11949/0438-1157.20200077