氮化硅粉体制备技术及粉体质量研究进展

向茂乔, 耿玉琦, 朱庆山

Research advances in preparation technology and quality of silicon nitride powder

Maoqiao XIANG, Yuqi GENG, Qingshan ZHU

化工学报 . 2022, (1): 73 -84 . DOI: 10.11949/0438-1157.20210866