包含偏硅酸影响的3D NAND磷酸湿法刻蚀动力学

彭子林, 周蕾, 邓庆航, 叶光华, 周兴贵

Kinetics of 3D NAND flash wet etching with phosphoric acid under the influence of H₂SiO₃

Zilin PENG, Lei ZHOU, Qinghang DENG, Guanghua YE, Xinggui ZHOU

化工学报 . 2025, (2): 645 -653 . DOI: 10.11949/0438-1157.20240709