Abstract: Supercritical fluid assisted atomization (SAA) is a promising process in producing micronic particles of controlled diameter that uses supercritical fluids to assist atomization processes.This technique allows drug micronization by using water as liquid solvent,but can work by using organic solvents too.Very sharp particle size distribution (PSD) can be obtained, that lies in the particle size range of aerosolizable drugs.The characteristics and schematic representation of the SAA process were described in detail.Results on six kinds of pharmaceutical compounds were illustrated,including particle size (PS), PSD and morphology while varying process parameters in the process respectively.No chemical modifications occurred during the SAA process.The process was developed on the pilot scale, showing great potential in pharmaceutical industry. SAA and several supercritical fluids based techniques (RESS, SAS, PGSS) for the production of micronic and nanometric particles of pharmaceutical compounds were compared. Finally the necessity to emphasize fundamental research was prospected and the mechanism and process nature in SAA were analyzed.