关键词:

内外环电容传感器, 传感器设计, 灵敏度分析, 有限元仿真

Abstract:

In order to design the inner and outer ring capacitance sensor used in measuring the correlation velocity of two phase flow and optimize its structure, the sensitivity characteristics of inner and outer ring capacitance sensor were analyzed by using finite element simulationThe simulation experiment was planned by using orthogonal experimental designFrom the simulation result, the major factors influencing the sensitivity characteristics (relative sensitivity and uniformity error) were obtainedThe degree and tendency of influence of each factor on the sensitivity characteristics were givenThe structural parameters of the sensor were determinedThe analysis provided the theoretical basis for the inner and outer ring capacitance sensor.

Key words:

内外环电容传感器, 传感器设计, 灵敏度分析, 有限元仿真