关键词: 多晶硅, 改良西门子法, 高频电源技术, 硅烷法, 气液沉积法

Abstract: High-frequency power conversion，silane fluidized bed process and vapor-to-liquid deposition can be combined with modified Siemens process to reduce production cost and improve quality of polysilicon. This paper summarizes modified Siemens process，silane fluidized bed process and vapor-to-liquid deposition，and analyzes their advantages and disadvantages as well as their development directions. The present modified Siemens process needs improvement of its core equipment and the application of high-frequency power conversion，the silane fluidized bed process needs to further research and develop the existing fluidized bed heating mode，the vapor-to-liquid deposition process can be combined with existing technologies to form a variety of process routes，and the combination of the silica carbochlorination process to prepare silicon tetrachloride and hydrogen reduction of silicon tetrachloride for preparing polysilicon can greatly shorten process route，make purification of silicon tetrachloride easier，and polysilicon can be produced with higher quality and lower cost.

Key words: polysilicon, modified Siemens process, high-frequency power conversion, silane fluidized bed process, vapor-to-liquid deposition