Simulation of Heat Transfer and Oxygen Transport in a Czochralski Silicon System with and Without a Cusp Magnetic Field

CIESC Journal

• TRANSPORT PHENOMENA & FLUID MECHANICS • 上一篇下一篇

Simulation of Heat Transfer and Oxygen Transport in a Czochralski Silicon System with and Without a Cusp Magnetic Field

YU Huiping(宇慧平), WANG Jing(王敬), SUI Yunkang(隋允康), DAI Xiaolin(戴小林) and AN Guoping(安国平)

Numerical Simulation Center of Engineering, Beijing University of Technology, Beijing 100022, China
General Research Institute for Nonferrous Metals, Beijing 100088, China

收稿日期:1900-01-01 修回日期:1900-01-01 出版日期:2006-02-28 发布日期:2006-02-28
通讯作者: YU Huiping(宇慧平)

Simulation of Heat Transfer and Oxygen Transport in a Czochralski Silicon System with and Without a Cusp Magnetic Field

Received:1900-01-01 Revised:1900-01-01 Online:2006-02-28 Published:2006-02-28

摘要/Abstract

摘要： Simulations of heat transfer and oxygen transport during a Czochralski growth of silicon with and without a cusp magnetic field were carried out. A finite volume method with a low-Reynolds number K-ε model proposed by Jones-Launder was employed. The numerical results were compared with the experimental data in the literature. It is found that the calculated results are in good agreement with the experimental data.

关键词: Czochralski;magnetic field;turbulent model;silicon

Key words: Czochralski, magnetic field, turbulent model, silicon

YU Huiping(宇慧平), WANG Jing(王敬), SUI Yunkang(隋允康), DAI Xiaolin(戴小林) and AN Guoping(安国平). Simulation of Heat Transfer and Oxygen Transport in a Czochralski Silicon System with and Without a Cusp Magnetic Field[J]. CIESC Journal.

参考文献

1    Xiao, Q., Derby, J. J., “Three-dimensional melt flows in Czochralski oxide growth: High-resolution, massively parallel, finite element computations”, J. Cryst. Growth, 152, 169—181 (1995).
2    Oshima, M., Taniguichi, N., Kobayashi, T., “Numerical investigation of three-dimensional melt convection with the magnetic Czochralski method”, J. Cryst. Growth, 137, 48—53 (1994).
3    Kobayashi, S., Miyahara, S., Fujiwara, T., “Turbulent heat transfer through the melt in silicon Czochralski growth”, J. Cryst. Growth, 109, 149—154 (1991).
4    Zhang, T., Ladeinde, F., Zhang, H., “A comparison of turbulence models for natural convection in enclosures applications to crystal growth processes”, In: Proc. 31st National Heat Transfer Conference, HTD, 323, 17—26 (1996).
5    Ren, B.Y., Zhang, Z.C., Liu, C.C., “Study of relationship between temperature distribution”, Chinese Science Ab-stract, 6, 1028—1030 (2000).
6    Gong, J.B., Wei, H.Y., Wang, J.K., “Simulation and scale-up of barium sulphate precipitation process using CFD modeling”, Chinese J. Chem. Eng., 13(2),167—172 (2005).
7    Lipchin, A., Brown, R.A., “Comparison of three turbu-lence models for simulation of melt convection in Czochralski crystal growth of silicon”, J. Cryst. Growth, 205, 71—91 (1999).
8    Jones, W. P., Launder, B.E., “The prediction of laminari-zation with a two-equation model of turbulence”, Inter. J. Heat and Mass Transfer, 15, 301—311 (1972).
9    Hirata, H., Hoshikawa, K., “Three-dimensional numeri-cal analyses of the effects of a cusp magnetic field on the flows, oxygen transport and heat transfer in a Czochral-ski silicon melt ”, J. Cryst. Growth, 125, 181—207 (1992).
10    Hirata, H., Hoshikawa, K., “Oxygen solubility and its temperature dependence in a silicon melt in equilibrium with solid silica”, J. Cryst. Growth, 106, 657—664 (1990).
11    Xu, D., Shu, C., Khoo, B.C., “Numerical simulation of flows in Czochralski crystal growth by second-order up-wind QUICK scheme” , J. Cryst. Growth, 173, 123—131 (1997).
12    Patankar, S.V., Spalding, D. B., “A calculation procedure for heat, mass and momentum transfer in three-dimensional parabolic flows”, Inter. J. Heat and Mass Transfer, 15, 1787—1806 (1972).

Simulation of Heat Transfer and Oxygen Transport in a Czochralski Silicon System with and Without a Cusp Magnetic Field

Simulation of Heat Transfer and Oxygen Transport in a Czochralski Silicon System with and Without a Cusp Magnetic Field

PDF (PC)

可视化

被引次数

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 0

编辑推荐

Metrics

本文评价