低压化学蒸气淀积(LPCVD)反应器的模拟和分析

朱开宏,陈良恒,袁渭康

Modeling and Analysis of LPCVD Reactors

Zhu Kaihong, Chen Lianhen and Yuan Weikang(East China Institute of Chemical Technology, Shanghai)

CIESC Journal . 1989, (5): 540 -548 .