化学气相淀积反应器中成核与成膜控制
李春忠,胡黎明,袁渭康,陈敏恒
CONTROLLING OF PARTICLE FORMATION AND FILM GROWTH IN THE CVD REACTOR
Li Chunzhong, Hu Liming, Yuan Weikang and Chen Minheng
(Technical Chemico-Physics Institute, East China University of Chemical Technology, Shanghai 200237)
CIESC Journal
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1993, (5): 523
-530
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