Abstract:

Hexafluorobutadiene is an original，efficient and environmental friendly etch gas for dielectric etch processing，which has been paid much attention to in semiconductor devices，manufacturing. This paper elaborates on the evolution and future direction of hexafluorobutadiene synthesis. Until today，the key for synthesis of hexafluorobutadiene mainly revolves around the preparation of two kinds of important intermediates，1,2,3,4-tetrahalo-hexafluorobutane and trifluorovinylzinc，but these synthesis methods are unsatisfactory from the perspective of commercialization. Finally，advantages and disadvantages of various methods are evaluated，and the commercialization prospect of hexafluorobutadiene synthesis is also discussed.

摘要：

作为一种高效、环保的新型蚀刻气，六氟丁二烯已受到半导体行业的广泛重视。本文介绍了多年来六氟丁二烯合成方法的发展和未来动向。至今，六氟丁二烯的合成方法大部分都是围绕制备四卤六氟丁烷和卤化三氟乙烯基锌两类中间体进行，但从工业化生产的角度来看，目前并没有令人满意的合成路线。最后，通过系统评述各类方法的优缺点，展望了工业规模制备六氟丁二烯的发展前景。