Anti-scaling effect comparison of high-frequency electromagnetic pulses stimulation in processing chambers with different electrodes
XIONG Lan, MIAO Xuefei, WU Yimei, CHEN Jiapeng, XIE Zijie
CIESC Journal . 2012, (10): 3220 -3224 .  DOI: 10.3969/j.issn.0438-1157.2012.10.031

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