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Study on the purification technology of 4N electronic-grade diethoxymethylsilane
Renze SHI, Qiuyan DING, Zhenjun YUAN, Jian NA, Jianhua LIU, Shuhu GUO, Xiong ZHAO, Hong LI, Xin GAO
CIESC Journal . 2025, (
5
): 2186 -2197 . DOI: 10.11949/0438-1157.20240994
