Abstract: According to computational results by Calerkin finite element method, comparisons are presented in terms of the distributions of velocity, temperature, TiCl4 concentration and the deposition rate of TiN in hot-wall reactors and cold-wall reactors. The effects of flow patterns, heat and mass transfer on coating qualities and deposition rate of TiN are analysed. The general results provide the guidelines for kinetic studies and the design of commercial CVD reactors.

摘要： 分析了热壁化学气相淀积反应器在流型、温度和浓度分布以及淀积速率等方面与冷壁反应器的异同,探讨了流动特性、传递过程和反应器几何尺寸对淀积过程的影响,为淀积不同薄膜时反应器的选型及设计提供了方法和依据.