Kinetic and Microstructure of SiC Deposited from SiCl<sub>4</sub>-CH<sub>4</sub>-H<sub>2</sub>

Kinetic and Microstructure of SiC Deposited from SiCl₄-CH₄-H₂

YANG Yan, ZHANG Weigang

CIESC Journal . 2009, (3): 419 -426 .