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Fabrication process of MEMS print head based on silicon-silicon low temperature direct bonding
Yanzhao ZHAI, Anjiang CAI, Dongpeng ZHANG, Chao HAN, Li LI
CIESC Journal . 2019, (
3
): 1220 -1226 . DOI: 10.11949/j.issn.0438-1157.20180919
