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Preparation and high-resolution lithography study of organic tin photoresists containing acrylates
Yingdong ZHAO, Peijun JI, Riyao CONG, Haichao FU, Jialong ZHANG, Pengzhong CHEN, Xiaojun PENG
CIESC Journal . 2025, (
4
): 1820 -1830 . DOI: 10.11949/0438-1157.20241135
