Abstract: High-frequency power conversion，silane fluidized bed process and vapor-to-liquid deposition can be combined with modified Siemens process to reduce production cost and improve quality of polysilicon. This paper summarizes modified Siemens process，silane fluidized bed process and vapor-to-liquid deposition，and analyzes their advantages and disadvantages as well as their development directions. The present modified Siemens process needs improvement of its core equipment and the application of high-frequency power conversion，the silane fluidized bed process needs to further research and develop the existing fluidized bed heating mode，the vapor-to-liquid deposition process can be combined with existing technologies to form a variety of process routes，and the combination of the silica carbochlorination process to prepare silicon tetrachloride and hydrogen reduction of silicon tetrachloride for preparing polysilicon can greatly shorten process route，make purification of silicon tetrachloride easier，and polysilicon can be produced with higher quality and lower cost.

Key words: polysilicon, modified Siemens process, high-frequency power conversion, silane fluidized bed process, vapor-to-liquid deposition

摘要： 还原高频电源技术、硅烷流化床法和气液沉积法，可与改良西门子法工艺技术有机结合生产多晶硅，对解决目前国内多晶硅所面临的生产成本高、产品质量低下等问题具有非常重要的意义。本文总结了改良西门子法、硅烷流化床法和气液沉积法生产多晶硅的工艺技术，分析了各自的优缺点和发展方向。指出了目前的改良西门子法核心设备的改进方向和应用还原高频电源技术、硅烷流化床技术需在加热方式上做进一步开发研究，气液沉积法可与现有的多种工艺技术相结合形成多种工艺路线，其中二氧化硅经碳热氯化法制备四氯化硅后，与氢气还原四氯化硅法相结合制备多晶硅，是值得研究开发的一种新工艺路线。该工艺路线不仅工艺流程大大缩减，而且四氯化硅的提纯比其他氯硅烷更容易，生产的多晶硅产品质量更高、成本更低。

关键词: 多晶硅, 改良西门子法, 高频电源技术, 硅烷法, 气液沉积法