Abstract: Based on the traditional polysilicon reduction furnace, a novel polysilicon reduction furnace is presented.The velocity and temperature fields are simulated by using computational fluid dynamic.The simulation result of the flow field shows that the flow pattern of the gas mixture in the novel furnace is plug flow, which is fundamentally different from that in traditional furnace.The simulation shows that the temperature field in the novel furnace can be controlled by changing the operating parameters, which solves the problem of high local temperature in traditional furnace, avoids the generation of the silicon powder and reduces the radiation power consumption.The energy consumption in the novel furnace is 8.5% lower than that in the traditional furnace.

Key words: polysilicon, reduction furnace, numerical simulation

摘要： 在传统多晶硅还原炉结构基础上,提出了一种内部流场为平推式流动的新型多晶硅还原炉,并采用计算流体力学方法研究了该还原炉内的速度场和温度场。流场模拟结果表明,新型多晶硅还原炉内混合气的流动基本上实现了平推式流动;温度场模拟结果发现,通过改变操作参数,采用平推式流动可实现炉内温度场的控制,解决了传统还原炉局部温度过高的问题,可避免硅粉的产生,长期保持还原炉内壁面的抛光效果,降低还原炉辐射电耗;计算结果表明,在相同的条件下,采用新型多晶硅还原炉的还原电耗较传统还原炉可降低8.5%。

关键词: 多晶硅, 还原炉, 数值模拟