CIESC Journal ›› 2023, Vol. 74 ›› Issue (7): 2800-2813.DOI: 10.11949/0438-1157.20230380
• Reviews and monographs • Previous Articles Next Articles
Xiaokun HE1(), Rui LIU1, Yuan XUE2, Ran ZUO3()
Received:
2023-04-17
Revised:
2023-06-02
Online:
2023-08-31
Published:
2023-07-05
Contact:
Ran ZUO
通讯作者:
左然
作者简介:
何晓崐(1987—),男,硕士,讲师,kenhe25@163.com
基金资助:
CLC Number:
Xiaokun HE, Rui LIU, Yuan XUE, Ran ZUO. Review of gas phase and surface reactions in AlN MOCVD[J]. CIESC Journal, 2023, 74(7): 2800-2813.
何晓崐, 刘锐, 薛园, 左然. MOCVD生长AlN单晶薄膜的气相和表面化学反应综述[J]. 化工学报, 2023, 74(7): 2800-2813.
Fig.2 (a) Conventional MOCVD; (b) Process of MEMOCVD: High-temperature AlN layer is grown on the low-temperature AlN nucleation layer with an alternative supply of TMAl and NH3 for alleviating the low surface mobility of Al atoms; (c) Process of nano-scale lateral overgrowth: Crystals grow upward from unmodified sapphire pit grooves and then laterally, covering the modified region and the spread of dislocations is suppressed[24]
方法 | 优点 | 缺点 | 文献 |
---|---|---|---|
实验测量 | 可获知气相物质种类和浓度;获得生长速率及其与压力、温度、反应器结构等之间的关系 | 价格昂贵,无法针对各种不同的实验条件分别进行观测,无法直接观测到化学反应中间过程以及反应过渡态 | [ |
CFD仿真 | 结合反应动力学,可模拟不同反应器内、不同操作条件下的生长过程,获得生长速率与温度、压力之间的关系;可直观显示不同反应物质的浓度分布 | 反应动力学数据,如速率常数、指前因子、气相物质的物化性质等需通过实验测量或量化计算获得;需要将真实环境进行适当简化 | [ |
量化计算 | 可以在分子水平上预测化学反应,获得分子构型和能量,确定反应势能面和过渡态,判断反应发生的概率,获得反应动力学数据,如活化能、指前因子等 | 无法获知反应器各部位的温度和压强,因此无法预测实际生长中反应是否发生和反应速率大小,无法建立反应速率与温度、压强、浓度的关系 | [ |
Table 1 Methods for studying the gas phase reaction mechanism of AlN-MOCVD
方法 | 优点 | 缺点 | 文献 |
---|---|---|---|
实验测量 | 可获知气相物质种类和浓度;获得生长速率及其与压力、温度、反应器结构等之间的关系 | 价格昂贵,无法针对各种不同的实验条件分别进行观测,无法直接观测到化学反应中间过程以及反应过渡态 | [ |
CFD仿真 | 结合反应动力学,可模拟不同反应器内、不同操作条件下的生长过程,获得生长速率与温度、压力之间的关系;可直观显示不同反应物质的浓度分布 | 反应动力学数据,如速率常数、指前因子、气相物质的物化性质等需通过实验测量或量化计算获得;需要将真实环境进行适当简化 | [ |
量化计算 | 可以在分子水平上预测化学反应,获得分子构型和能量,确定反应势能面和过渡态,判断反应发生的概率,获得反应动力学数据,如活化能、指前因子等 | 无法获知反应器各部位的温度和压强,因此无法预测实际生长中反应是否发生和反应速率大小,无法建立反应速率与温度、压强、浓度的关系 | [ |
Fig.9 Adsorption structures of DMAlNH2 on the ideal AlN(0001)-Al terminated surface (the dotted line indicates the bond with surface atom, the dashed line indicates the possible broken bond in the adsorbate)[83]
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