关键词: 高纯砷, 半导体材料, 还原, 蒸馏, 热解

Abstract: The preparation technology，present situation of manufacture，and research progress of high purity arsenic are presented. Several preparation methods，such as liquid phase chlorination reduction，gas phase chlorination reduction，sublimation distillation，and thermal decomposition are reviewed. The characteristics，advantages and drawbacks of the methods mentioned above are analyzed. The development trend of preparation of high purity arsenic is prospected. Chlorination reduction and sublimation distillation are the main processes to prepare high purity arsenic at present，however the product is contaminated easily by residue，such as lead and antimony in the distillation process and corrosion of equipment and pollution of environment are involved in the chlorination reduction process. Thermal decomposition of As(OR)3 and arsenic sulfide hydroreduction produce no waste and are prospective in the future.

Key words: high purity arsenic, semiconductor materials, reduction, distillation, pyrolysis