CIESC Journal ›› 2022, Vol. 73 ›› Issue (5): 2251-2261.DOI: 10.11949/0438-1157.20211726
• Material science and engineering, nanotechnology • Previous Articles Next Articles
Yuxin REN1(),Runfeng XU1,Wanying WANG1,Pengzhong CHEN1,2(),Xiaojun PENG1
Received:
2021-12-02
Revised:
2022-03-08
Online:
2022-05-24
Published:
2022-05-05
Contact:
Pengzhong CHEN
任玉鑫1(),徐润峰1,王婉颖1,陈鹏忠1,2(),彭孝军1
通讯作者:
陈鹏忠
作者简介:
任玉鑫(1997—),女,硕士研究生,基金资助:
CLC Number:
Yuxin REN, Runfeng XU, Wanying WANG, Pengzhong CHEN, Xiaojun PENG. Synthesis and stability study of anthraquinone dyes for color photoresist[J]. CIESC Journal, 2022, 73(5): 2251-2261.
任玉鑫, 徐润峰, 王婉颖, 陈鹏忠, 彭孝军. 彩色光刻胶用蒽醌染料的合成及稳定性研究[J]. 化工学报, 2022, 73(5): 2251-2261.
溶剂 | 染料 | λmax/nm | ε/(104 L/(mol·cm)) | λmax/nm | ε/(104 L/(mol·cm)) |
---|---|---|---|---|---|
DMF | A1 | 600 | 1.50 | 645 | 1.82 |
A2 | 595 | 1.69 | 645 | 2.05 | |
A3 | 600 | 1.60 | 645 | 1.98 | |
A4 | 595 | 1.36 | 640 | 1.56 | |
A5 | 595 | 1.14 | 640 | 1.28 | |
A6 | 595 | 1.35 | 640 | 1.57 | |
A7 | 595 | 1.52 | 640 | 1.78 | |
A8 | 595 | 0.83 | 645 | 0.84 | |
A9 | 595 | 0.72 | 645 | 0.73 | |
溶剂蓝78 | 600 | 1.40 | 645 | 1.58 | |
PGME | A1 | 598 | 1.41 | 648 | 1.68 |
A2 | 598 | 1.59 | 646 | 1.91 | |
A3 | 598 | 1.44 | 646 | 1.76 | |
A4 | 595 | 1.51 | 640 | 1.71 | |
A5 | 594 | 1.11 | 638 | 1.23 | |
A6 | 594 | 1.44 | 640 | 1.66 | |
A7 | 594 | 1.34 | 640 | 1.54 | |
A8 | 598 | 0.51 | 640 | 0.49 | |
A9 | 594 | 0.40 | 642 | 0.39 | |
溶剂蓝78 | 598 | 1.20 | 646 | 1.38 | |
PGMEA | A1 | 598 | 1.54 | 648 | 1.81 |
A2 | 598 | 1.57 | 644 | 1.85 | |
A3 | 598 | 1.56 | 646 | 1.83 | |
A4 | 595 | 1.58 | 638 | 1.75 | |
A5 | 592 | 1.14 | 638 | 1.23 | |
A6 | 594 | 1.25 | 640 | 1.41 | |
A7 | 591 | 1.57 | 638 | 1.78 | |
A8 | 596 | 0.71 | 640 | 0.70 | |
A9 | 598 | 0.53 | 642 | 0.51 | |
溶剂蓝78 | 600 | 1.33 | 643 | 1.47 |
Table 1 Spectroscopic data of dyes in organic solvents
溶剂 | 染料 | λmax/nm | ε/(104 L/(mol·cm)) | λmax/nm | ε/(104 L/(mol·cm)) |
---|---|---|---|---|---|
DMF | A1 | 600 | 1.50 | 645 | 1.82 |
A2 | 595 | 1.69 | 645 | 2.05 | |
A3 | 600 | 1.60 | 645 | 1.98 | |
A4 | 595 | 1.36 | 640 | 1.56 | |
A5 | 595 | 1.14 | 640 | 1.28 | |
A6 | 595 | 1.35 | 640 | 1.57 | |
A7 | 595 | 1.52 | 640 | 1.78 | |
A8 | 595 | 0.83 | 645 | 0.84 | |
A9 | 595 | 0.72 | 645 | 0.73 | |
溶剂蓝78 | 600 | 1.40 | 645 | 1.58 | |
PGME | A1 | 598 | 1.41 | 648 | 1.68 |
A2 | 598 | 1.59 | 646 | 1.91 | |
A3 | 598 | 1.44 | 646 | 1.76 | |
A4 | 595 | 1.51 | 640 | 1.71 | |
A5 | 594 | 1.11 | 638 | 1.23 | |
A6 | 594 | 1.44 | 640 | 1.66 | |
A7 | 594 | 1.34 | 640 | 1.54 | |
A8 | 598 | 0.51 | 640 | 0.49 | |
A9 | 594 | 0.40 | 642 | 0.39 | |
溶剂蓝78 | 598 | 1.20 | 646 | 1.38 | |
PGMEA | A1 | 598 | 1.54 | 648 | 1.81 |
A2 | 598 | 1.57 | 644 | 1.85 | |
A3 | 598 | 1.56 | 646 | 1.83 | |
A4 | 595 | 1.58 | 638 | 1.75 | |
A5 | 592 | 1.14 | 638 | 1.23 | |
A6 | 594 | 1.25 | 640 | 1.41 | |
A7 | 591 | 1.57 | 638 | 1.78 | |
A8 | 596 | 0.71 | 640 | 0.70 | |
A9 | 598 | 0.53 | 642 | 0.51 | |
溶剂蓝78 | 600 | 1.33 | 643 | 1.47 |
染料 | SPGMEA | SDMF |
---|---|---|
A1 | 8.41 | 2.50 |
A2 | 5.79 | 2.03 |
A3 | 1.87 | 0.94 |
A4 | 5.60 | 6.12 |
A5 | 5.32 | 5.92 |
A6 | 3.76 | 4.67 |
A7 | 3.72 | 9.90 |
A8 | 0.25 | 0.81 |
A9 | 0.18 | 1.20 |
Table 2 Solubility of dyes in organic solvents
染料 | SPGMEA | SDMF |
---|---|---|
A1 | 8.41 | 2.50 |
A2 | 5.79 | 2.03 |
A3 | 1.87 | 0.94 |
A4 | 5.60 | 6.12 |
A5 | 5.32 | 5.92 |
A6 | 3.76 | 4.67 |
A7 | 3.72 | 9.90 |
A8 | 0.25 | 0.81 |
A9 | 0.18 | 1.20 |
染料 | 光照前 | 光照后 | ΔE | ||||
---|---|---|---|---|---|---|---|
L | a | b | L | a | b | ||
A1 | 84.518 | -18.715 | -23.367 | 85.577 | -16.489 | -21.677 | 2.99 |
A2 | 81.446 | -21,160 | -30.003 | 82.039 | -19.813 | -28.698 | 1.96 |
A3 | 84.845 | -17.406 | -24.473 | 85.031 | -16.055 | -23.718 | 1.56 |
A4 | 79.305 | -19.392 | -33.490 | 79.678 | -18.186 | -32.311 | 1.73 |
A5 | 86.429 | -12.869 | -19.214 | 87.066 | -11.554 | -19.437 | 1.48 |
A6 | 82.322 | -18.314 | -27.970 | 82.493 | -16.874 | -26.368 | 2.16 |
A7 | 83.177 | -15.160 | -26.529 | 83.442 | -13.973 | -25.931 | 1.36 |
A8 | 85.299 | -14.146 | -21.558 | 87.386 | -7.471 | -16.721 | 8.50 |
A9 | 84.699 | -16.060 | -23.370 | 86.129 | -9.713 | -19.805 | 7.41 |
溶剂蓝78 | 83.923 | -14.011 | -23.774 | 84.963 | -13.864 | -22.040 | 1.40 |
Table 3 L,a,b data and color difference value (ΔE) of dyes before and after accelerated irradiation
染料 | 光照前 | 光照后 | ΔE | ||||
---|---|---|---|---|---|---|---|
L | a | b | L | a | b | ||
A1 | 84.518 | -18.715 | -23.367 | 85.577 | -16.489 | -21.677 | 2.99 |
A2 | 81.446 | -21,160 | -30.003 | 82.039 | -19.813 | -28.698 | 1.96 |
A3 | 84.845 | -17.406 | -24.473 | 85.031 | -16.055 | -23.718 | 1.56 |
A4 | 79.305 | -19.392 | -33.490 | 79.678 | -18.186 | -32.311 | 1.73 |
A5 | 86.429 | -12.869 | -19.214 | 87.066 | -11.554 | -19.437 | 1.48 |
A6 | 82.322 | -18.314 | -27.970 | 82.493 | -16.874 | -26.368 | 2.16 |
A7 | 83.177 | -15.160 | -26.529 | 83.442 | -13.973 | -25.931 | 1.36 |
A8 | 85.299 | -14.146 | -21.558 | 87.386 | -7.471 | -16.721 | 8.50 |
A9 | 84.699 | -16.060 | -23.370 | 86.129 | -9.713 | -19.805 | 7.41 |
溶剂蓝78 | 83.923 | -14.011 | -23.774 | 84.963 | -13.864 | -22.040 | 1.40 |
染料 | 失重率(230℃)/% | Td/℃ |
---|---|---|
A1 | 14.56 | 250 |
A2 | 55.24 | 250 |
A3 | 1.18 | 300 |
A4 | 2.13 | 300 |
A5 | 15.00 | 250 |
A6 | 5.63 | 300 |
A7 | 1.92 | 300 |
A8 | 5.77 | 200 |
A9 | 9.15 | 200 |
溶剂蓝78 | 43.95 | 250 |
Table 4 The weight loss of dyes at 230℃ for 30 min and decomposition temperature
染料 | 失重率(230℃)/% | Td/℃ |
---|---|---|
A1 | 14.56 | 250 |
A2 | 55.24 | 250 |
A3 | 1.18 | 300 |
A4 | 2.13 | 300 |
A5 | 15.00 | 250 |
A6 | 5.63 | 300 |
A7 | 1.92 | 300 |
A8 | 5.77 | 200 |
A9 | 9.15 | 200 |
溶剂蓝78 | 43.95 | 250 |
染料 | 后烘前 | 后烘后 | ΔE | ||||
---|---|---|---|---|---|---|---|
L | a | b | L | a | b | ||
A4 | 97.17 | -3.06 | -4.42 | 98.43 | -1.68 | -2.52 | 2.66 |
A7 | 94.61 | -4.61 | -7.84 | 94.73 | -4.41 | -7.81 | 0.24 |
Table 5 The color difference of the dye film before and after post-bake
染料 | 后烘前 | 后烘后 | ΔE | ||||
---|---|---|---|---|---|---|---|
L | a | b | L | a | b | ||
A4 | 97.17 | -3.06 | -4.42 | 98.43 | -1.68 | -2.52 | 2.66 |
A7 | 94.61 | -4.61 | -7.84 | 94.73 | -4.41 | -7.81 | 0.24 |
染料 | 光照前 | 光照后 | ΔE | ||||
---|---|---|---|---|---|---|---|
L | a | b | L | a | b | ||
A4 | 97.03 | -3.19 | -4.83 | 96.99 | -3.22 | -4.67 | 0.16 |
A7 | 94.74 | -4.51 | -8.02 | 94.71 | -4.37 | -7.93 | 0.17 |
Table 6 The color difference of the dye film before and after irradiation
染料 | 光照前 | 光照后 | ΔE | ||||
---|---|---|---|---|---|---|---|
L | a | b | L | a | b | ||
A4 | 97.03 | -3.19 | -4.83 | 96.99 | -3.22 | -4.67 | 0.16 |
A7 | 94.74 | -4.51 | -8.02 | 94.71 | -4.37 | -7.93 | 0.17 |
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