Experiment of thin film thermal sensor based on vacuum coating technology

doi:10.11949/0438-1157.20190571

Abstract

Abstract:

A thin film thermal sensor based on mica was fabricated by vacuum evaporation coating technology, which comprises a thermopile for heat flow measurement and a thermocouple for temperature measurement. Comprehensive test results show that mica substrate sensor perform satisfactorily. The static calibration fitting linear correlation coefficient of encapsulated film thermocouple can reach 0.999. Correlation coefficient of static calibration fitting line for film heat flow meter was 0.99439, probe coefficient was 8.78886 W/(m²?μV), and sensitivity of film heat flow meter was 0.11378 μV/(W/m²). Dynamic response time of the film thermocouple measured twice was 0.446 s. As the loading heat flow increased, the dynamic response time of film heat flow meter increased. Response time was 0.483 s when the step heat flow value was 600 W/m².

Key words: film, measurement, transient response, heat transfer, fuel cells

摘要：

采用真空蒸发镀膜技术设计制作了以云母为基片的薄膜热传感器，传感器包括一个用于热流测量的热电堆和一个用于温度测量的热电偶。综合测试发现：云母基片薄膜热传感器性能良好。封装后，薄膜热电偶的静态标定拟合直线相关系数均可以达到0.999。薄膜热流计的静态标定拟合直线的相关系数为0.99439，测头系数为8.78886 W/(m²?μV)，灵敏度为0.11378 μV/(W/m²)。薄膜热电偶的动态响应时间是0.446 s且具有良好的复现性。随着加载热流的增大，薄膜热流计的动态响应时间变大，阶跃热流值为600 W/m²时响应时间为0.483 s。

关键词: 膜, 测量, 瞬态响应, 传热, 燃料电池

CLC Number:

TK 311

Xiao LUO, Hang GUO, Fang YE, Chongfang MA. Experiment of thin film thermal sensor based on vacuum coating technology[J]. CIESC Journal, 2019, 70(S2): 123-129.

罗潇, 郭航, 叶芳, 马重芳. 基于真空镀膜技术的薄膜热传感器实验[J]. 化工学报, 2019, 70(S2): 123-129.

Figures/Tables 10

Table 1 Thickness and physical properties of mica substrate

材料

厚度/ mm

膨胀系数/(μm/K)

热导率/

(W/(m·K))

Fig.1 Structure map of thin film sensor

Fig.2 Physical map of thin film sensor

Fig.3 Physical map of lead wire

Fig.4 Calibration results comparison of temperature on mica substrate sensor

Fig.5 Calibration result of heat flux on mica substrate sensor with surface temperature calibrator

Fig.6 Temperature dynamic response of thin film sensor on mica substrate

Fig.7 Reproducibility of dynamic response of temperature on mica substrate sensor

Fig.8 Dynamic response of sensor on mica substrate at different outputs

Fig.9 Dynamic response of sensor on mica substrate to period heat flux at different outputs

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