化工学报

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三氟化氮精馏分离流程的设计与控制研究

孟祥军1,2(), 杨林睿1, 彭立培2, 杨献奎2, 花莹曦2, 张人仁1, 郑凯天1, 许春建1()   

  1. 1.天津大学化工学院,化学工程联合国家重点实验室,天津 300072
    2.中船(邯郸)派瑞特种气体股份有限公司,河北 邯郸 056002
  • 收稿日期:2024-07-01 修回日期:2024-08-16 出版日期:2024-08-29
  • 通讯作者: 许春建
  • 作者简介:孟祥军(1979—),男,博士研究生,研究员,mengxiangjun@pericsg.com
  • 基金资助:
    国家科技重大专项(013ZX02401);化学工程联合国家重点实验室自主研究课题(SKL-ChE-22T06)

Study on design and control of nitrogen trifluoride distillation separation process

Xiangjun MENG1,2(), Linrui YANG1, Lipei PENG2, Xiankui YANG2, Yingxi HUA2, Renren ZHANG1, Kaitian ZHENG1, Chunjian XU1()   

  1. 1.State Key Laboratory of Chemical Engineering, School of Chemical Engineering and Technology, Tianjin University, Tianjin 300072, China
    2.Peric Special Gases Co. Ltd, Handan 056002, Hebei, China
  • Received:2024-07-01 Revised:2024-08-16 Online:2024-08-29
  • Contact: Chunjian XU

摘要:

三氟化氮在集成电路制造的刻蚀和清洗工艺中起到关键作用,其产品纯度和纯度稳定性要求高,精馏过程能耗大。以三氟化氮精馏过程的节能和可控性为研究对象,系统研究了三氟化氮精馏过程的分离序列、热集成和过程控制。(1)在工业现有的顺式分离序列流程的基础上,提出了反式分离序列流程、热集成顺式分离序列流程和热集成反式分离序列流程,模拟计算结果表明热集成反式分离序列流程为较优流程,在年处理量为120000 kmol的情况下,与顺式分离序列流程相比,年度总成本降低了96.4万元/年;(2)对顺式分离序列流程和热集成反式分离序列流程进行了动态控制结构研究,结果表明提出的控制结构对进料流量和组成的干扰具有良好的控制性能。研究结果可为工业化的三氟化氮精馏过程的节能和控制提供指导。

关键词: 精馏, 纯化, 分离, 动态模拟

Abstract:

Nitrogen trifluoride plays a critical role in the etching and cleaning processes in integrated circuit fabrication, demanding high product purity and purity stability, with the distillation process being energy-intensive. Focusing on the energy efficiency and controllability of the nitrogen trifluoride distillation process, the separation sequences, thermal integration, and dynamic control of the process were systematically studied. (1) Based on the existing industrial direct separation sequence process, the indirect separation sequence process, the heat-integrated direct separation sequence process, and the heat-integrated indirect separation sequence process were proposed. Simulation results indicate that the heat-integrated indirect separation sequence process is optimal, reducing the total annual cost by 96.4×104 yuan/year compared to the direct separation sequence process with an annual capacity of 120000 kmol. (2) A dynamic control structure study for the direct separation sequence process and the heat-integrated indirect separation sequence process was conducted. Results show that the proposed control structures exhibit excellent control performance for disturbances in feed flow and composition. The findings provide guidance on energy-saving and control strategies for the industrial nitrogen trifluoride distillation process.

Key words: distillation, purification, separation, dynamic simulation

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