化工学报 ›› 2022, Vol. 73 ›› Issue (5): 2251-2261.DOI: 10.11949/0438-1157.20211726
任玉鑫1(),徐润峰1,王婉颖1,陈鹏忠1,2(),彭孝军1
收稿日期:
2021-12-02
修回日期:
2022-03-08
出版日期:
2022-05-05
发布日期:
2022-05-24
通讯作者:
陈鹏忠
作者简介:
任玉鑫(1997—),女,硕士研究生,基金资助:
Yuxin REN1(),Runfeng XU1,Wanying WANG1,Pengzhong CHEN1,2(),Xiaojun PENG1
Received:
2021-12-02
Revised:
2022-03-08
Online:
2022-05-05
Published:
2022-05-24
Contact:
Pengzhong CHEN
摘要:
为实现彩色滤光片更高分辨率的发展需求,作为关键原材料的彩色光刻胶着色剂从颜料向染料体系转变是重要的趋势。然而染料分子的光热稳定性较差,亟需从分子结构方面探索提升稳定性的有效策略。以1,4,9,10-蒽四醇为原料,合成了9种1,4-二氨基取代的蓝色蒽醌染料分子,探索了不同取代基对染料分子光物理性质、溶解性以及光热稳定性的影响。结果表明,所有染料分子在590~600 nm和630~650 nm波长范围内呈现双吸收峰性质,具有高的摩尔消光系数。其中三甘醇及单甲醚取代的染料分子热分解温度为300℃,在230℃加热0.5 h后失重约2%,365 nm波长光照射8 h后色差低于1.73,表现出优异的光热稳定性。研究为进一步制备光热稳定性优异的彩色光刻胶用染料分子奠定了基础。
中图分类号:
任玉鑫, 徐润峰, 王婉颖, 陈鹏忠, 彭孝军. 彩色光刻胶用蒽醌染料的合成及稳定性研究[J]. 化工学报, 2022, 73(5): 2251-2261.
Yuxin REN, Runfeng XU, Wanying WANG, Pengzhong CHEN, Xiaojun PENG. Synthesis and stability study of anthraquinone dyes for color photoresist[J]. CIESC Journal, 2022, 73(5): 2251-2261.
溶剂 | 染料 | λmax/nm | ε/(104 L/(mol·cm)) | λmax/nm | ε/(104 L/(mol·cm)) |
---|---|---|---|---|---|
DMF | A1 | 600 | 1.50 | 645 | 1.82 |
A2 | 595 | 1.69 | 645 | 2.05 | |
A3 | 600 | 1.60 | 645 | 1.98 | |
A4 | 595 | 1.36 | 640 | 1.56 | |
A5 | 595 | 1.14 | 640 | 1.28 | |
A6 | 595 | 1.35 | 640 | 1.57 | |
A7 | 595 | 1.52 | 640 | 1.78 | |
A8 | 595 | 0.83 | 645 | 0.84 | |
A9 | 595 | 0.72 | 645 | 0.73 | |
溶剂蓝78 | 600 | 1.40 | 645 | 1.58 | |
PGME | A1 | 598 | 1.41 | 648 | 1.68 |
A2 | 598 | 1.59 | 646 | 1.91 | |
A3 | 598 | 1.44 | 646 | 1.76 | |
A4 | 595 | 1.51 | 640 | 1.71 | |
A5 | 594 | 1.11 | 638 | 1.23 | |
A6 | 594 | 1.44 | 640 | 1.66 | |
A7 | 594 | 1.34 | 640 | 1.54 | |
A8 | 598 | 0.51 | 640 | 0.49 | |
A9 | 594 | 0.40 | 642 | 0.39 | |
溶剂蓝78 | 598 | 1.20 | 646 | 1.38 | |
PGMEA | A1 | 598 | 1.54 | 648 | 1.81 |
A2 | 598 | 1.57 | 644 | 1.85 | |
A3 | 598 | 1.56 | 646 | 1.83 | |
A4 | 595 | 1.58 | 638 | 1.75 | |
A5 | 592 | 1.14 | 638 | 1.23 | |
A6 | 594 | 1.25 | 640 | 1.41 | |
A7 | 591 | 1.57 | 638 | 1.78 | |
A8 | 596 | 0.71 | 640 | 0.70 | |
A9 | 598 | 0.53 | 642 | 0.51 | |
溶剂蓝78 | 600 | 1.33 | 643 | 1.47 |
表1 染料在不同溶剂中的光谱数据
Table 1 Spectroscopic data of dyes in organic solvents
溶剂 | 染料 | λmax/nm | ε/(104 L/(mol·cm)) | λmax/nm | ε/(104 L/(mol·cm)) |
---|---|---|---|---|---|
DMF | A1 | 600 | 1.50 | 645 | 1.82 |
A2 | 595 | 1.69 | 645 | 2.05 | |
A3 | 600 | 1.60 | 645 | 1.98 | |
A4 | 595 | 1.36 | 640 | 1.56 | |
A5 | 595 | 1.14 | 640 | 1.28 | |
A6 | 595 | 1.35 | 640 | 1.57 | |
A7 | 595 | 1.52 | 640 | 1.78 | |
A8 | 595 | 0.83 | 645 | 0.84 | |
A9 | 595 | 0.72 | 645 | 0.73 | |
溶剂蓝78 | 600 | 1.40 | 645 | 1.58 | |
PGME | A1 | 598 | 1.41 | 648 | 1.68 |
A2 | 598 | 1.59 | 646 | 1.91 | |
A3 | 598 | 1.44 | 646 | 1.76 | |
A4 | 595 | 1.51 | 640 | 1.71 | |
A5 | 594 | 1.11 | 638 | 1.23 | |
A6 | 594 | 1.44 | 640 | 1.66 | |
A7 | 594 | 1.34 | 640 | 1.54 | |
A8 | 598 | 0.51 | 640 | 0.49 | |
A9 | 594 | 0.40 | 642 | 0.39 | |
溶剂蓝78 | 598 | 1.20 | 646 | 1.38 | |
PGMEA | A1 | 598 | 1.54 | 648 | 1.81 |
A2 | 598 | 1.57 | 644 | 1.85 | |
A3 | 598 | 1.56 | 646 | 1.83 | |
A4 | 595 | 1.58 | 638 | 1.75 | |
A5 | 592 | 1.14 | 638 | 1.23 | |
A6 | 594 | 1.25 | 640 | 1.41 | |
A7 | 591 | 1.57 | 638 | 1.78 | |
A8 | 596 | 0.71 | 640 | 0.70 | |
A9 | 598 | 0.53 | 642 | 0.51 | |
溶剂蓝78 | 600 | 1.33 | 643 | 1.47 |
染料 | SPGMEA | SDMF |
---|---|---|
A1 | 8.41 | 2.50 |
A2 | 5.79 | 2.03 |
A3 | 1.87 | 0.94 |
A4 | 5.60 | 6.12 |
A5 | 5.32 | 5.92 |
A6 | 3.76 | 4.67 |
A7 | 3.72 | 9.90 |
A8 | 0.25 | 0.81 |
A9 | 0.18 | 1.20 |
表2 染料在有机溶剂中的溶解度
Table 2 Solubility of dyes in organic solvents
染料 | SPGMEA | SDMF |
---|---|---|
A1 | 8.41 | 2.50 |
A2 | 5.79 | 2.03 |
A3 | 1.87 | 0.94 |
A4 | 5.60 | 6.12 |
A5 | 5.32 | 5.92 |
A6 | 3.76 | 4.67 |
A7 | 3.72 | 9.90 |
A8 | 0.25 | 0.81 |
A9 | 0.18 | 1.20 |
图 6 A4、A7~A9染料分子的PGMEA溶液(33 μmol/L)在365 nm波长光下连续光照8 h的透射光谱for 8 h
Fig.6 UV-vis transmittance spectra of A4,A7—A9(33 μmol/L) dyes in PGMEA upon illumination at 365 nm light
染料 | 光照前 | 光照后 | ΔE | ||||
---|---|---|---|---|---|---|---|
L | a | b | L | a | b | ||
A1 | 84.518 | -18.715 | -23.367 | 85.577 | -16.489 | -21.677 | 2.99 |
A2 | 81.446 | -21,160 | -30.003 | 82.039 | -19.813 | -28.698 | 1.96 |
A3 | 84.845 | -17.406 | -24.473 | 85.031 | -16.055 | -23.718 | 1.56 |
A4 | 79.305 | -19.392 | -33.490 | 79.678 | -18.186 | -32.311 | 1.73 |
A5 | 86.429 | -12.869 | -19.214 | 87.066 | -11.554 | -19.437 | 1.48 |
A6 | 82.322 | -18.314 | -27.970 | 82.493 | -16.874 | -26.368 | 2.16 |
A7 | 83.177 | -15.160 | -26.529 | 83.442 | -13.973 | -25.931 | 1.36 |
A8 | 85.299 | -14.146 | -21.558 | 87.386 | -7.471 | -16.721 | 8.50 |
A9 | 84.699 | -16.060 | -23.370 | 86.129 | -9.713 | -19.805 | 7.41 |
溶剂蓝78 | 83.923 | -14.011 | -23.774 | 84.963 | -13.864 | -22.040 | 1.40 |
表3 光照前后染料L、a、b数值以及色差变化(ΔE)
Table 3 L,a,b data and color difference value (ΔE) of dyes before and after accelerated irradiation
染料 | 光照前 | 光照后 | ΔE | ||||
---|---|---|---|---|---|---|---|
L | a | b | L | a | b | ||
A1 | 84.518 | -18.715 | -23.367 | 85.577 | -16.489 | -21.677 | 2.99 |
A2 | 81.446 | -21,160 | -30.003 | 82.039 | -19.813 | -28.698 | 1.96 |
A3 | 84.845 | -17.406 | -24.473 | 85.031 | -16.055 | -23.718 | 1.56 |
A4 | 79.305 | -19.392 | -33.490 | 79.678 | -18.186 | -32.311 | 1.73 |
A5 | 86.429 | -12.869 | -19.214 | 87.066 | -11.554 | -19.437 | 1.48 |
A6 | 82.322 | -18.314 | -27.970 | 82.493 | -16.874 | -26.368 | 2.16 |
A7 | 83.177 | -15.160 | -26.529 | 83.442 | -13.973 | -25.931 | 1.36 |
A8 | 85.299 | -14.146 | -21.558 | 87.386 | -7.471 | -16.721 | 8.50 |
A9 | 84.699 | -16.060 | -23.370 | 86.129 | -9.713 | -19.805 | 7.41 |
溶剂蓝78 | 83.923 | -14.011 | -23.774 | 84.963 | -13.864 | -22.040 | 1.40 |
染料 | 失重率(230℃)/% | Td/℃ |
---|---|---|
A1 | 14.56 | 250 |
A2 | 55.24 | 250 |
A3 | 1.18 | 300 |
A4 | 2.13 | 300 |
A5 | 15.00 | 250 |
A6 | 5.63 | 300 |
A7 | 1.92 | 300 |
A8 | 5.77 | 200 |
A9 | 9.15 | 200 |
溶剂蓝78 | 43.95 | 250 |
表4 染料在230℃加热30 min后的失重率及分解温度
Table 4 The weight loss of dyes at 230℃ for 30 min and decomposition temperature
染料 | 失重率(230℃)/% | Td/℃ |
---|---|---|
A1 | 14.56 | 250 |
A2 | 55.24 | 250 |
A3 | 1.18 | 300 |
A4 | 2.13 | 300 |
A5 | 15.00 | 250 |
A6 | 5.63 | 300 |
A7 | 1.92 | 300 |
A8 | 5.77 | 200 |
A9 | 9.15 | 200 |
溶剂蓝78 | 43.95 | 250 |
图9 后烘前后染料薄膜的透射光谱及光照前后染料薄膜的透射光谱
Fig.9 Transmittance spectra of dye film before and after post-bake and transmittance spectra of dye film before and after irradiation
染料 | 后烘前 | 后烘后 | ΔE | ||||
---|---|---|---|---|---|---|---|
L | a | b | L | a | b | ||
A4 | 97.17 | -3.06 | -4.42 | 98.43 | -1.68 | -2.52 | 2.66 |
A7 | 94.61 | -4.61 | -7.84 | 94.73 | -4.41 | -7.81 | 0.24 |
表5 后烘前后染料薄膜的色差
Table 5 The color difference of the dye film before and after post-bake
染料 | 后烘前 | 后烘后 | ΔE | ||||
---|---|---|---|---|---|---|---|
L | a | b | L | a | b | ||
A4 | 97.17 | -3.06 | -4.42 | 98.43 | -1.68 | -2.52 | 2.66 |
A7 | 94.61 | -4.61 | -7.84 | 94.73 | -4.41 | -7.81 | 0.24 |
染料 | 光照前 | 光照后 | ΔE | ||||
---|---|---|---|---|---|---|---|
L | a | b | L | a | b | ||
A4 | 97.03 | -3.19 | -4.83 | 96.99 | -3.22 | -4.67 | 0.16 |
A7 | 94.74 | -4.51 | -8.02 | 94.71 | -4.37 | -7.93 | 0.17 |
表6 光照前后染料薄膜的色差
Table 6 The color difference of the dye film before and after irradiation
染料 | 光照前 | 光照后 | ΔE | ||||
---|---|---|---|---|---|---|---|
L | a | b | L | a | b | ||
A4 | 97.03 | -3.19 | -4.83 | 96.99 | -3.22 | -4.67 | 0.16 |
A7 | 94.74 | -4.51 | -8.02 | 94.71 | -4.37 | -7.93 | 0.17 |
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