化工学报 ›› 2020, Vol. 71 ›› Issue (9): 3963-3978.DOI: 10.11949/0438-1157.20200582
收稿日期:
2020-05-13
修回日期:
2020-06-08
出版日期:
2020-09-05
发布日期:
2020-09-05
通讯作者:
权恒道
作者简介:
张呈平(1979—),男,博士,教授级高级工程师,基金资助:
Chengping ZHANG(),Feiyao QING,Xiaoqing JIA,Hengdao QUAN()
Received:
2020-05-13
Revised:
2020-06-08
Online:
2020-09-05
Published:
2020-09-05
Contact:
Hengdao QUAN
摘要:
综述了以双环戊二烯(DCPD)、六氯环戊二烯(HCCPD)或八氯环戊烯(OCP)为起始原料合成1,2-二氯六氟环戊烯(F6-12)、1,3-二氯六氟环戊烯(F6-13)、1-氯七氟环戊烯(F7-1)、1,1,2,2,3,3,4-七氟环戊烷(F7A)、1,1,2,2,3,3-六氟环戊烷(F6A)、顺式-1,1,2,2,3,3,4,5-八氟环戊烷(cis-F8A)、八氟环戊烯(F8E)、3,3,4,4,5,5-六氟环戊烯(F6E)、1,3,3,4,4,5,5-七氟环戊烯(F7E)等系列五元环氟化物的合成路线,以及五元环氟化物在电子清洗、电子刻蚀、合成电子氟化液的应用。提出了五元环氟化物的合成研究重点是新型合成路线的开发、高催化活性且对人体健康无害的过程催化剂的开发,以及无污染化工艺过程的开发,而应用研究重点是开发五元环氟化物的电子级产品以及开发五元环氟化物的下游产品。
中图分类号:
张呈平, 庆飞要, 贾晓卿, 权恒道. 五元环氟化物的合成及应用[J]. 化工学报, 2020, 71(9): 3963-3978.
Chengping ZHANG, Feiyao QING, Xiaoqing JIA, Hengdao QUAN. Synthesis and application of five-membered ring fluoride[J]. CIESC Journal, 2020, 71(9): 3963-3978.
项目 | F7A | HCFC-141b | HFC-365mfc | HFC-4310mee | HFE-449s1 |
---|---|---|---|---|---|
分子式 | C5H3F7 | C2H3Cl2F | C4H5F5 | C5H2F10 | C4F9OCH3 |
沸点/℃ | 82.5 | 32.05 | 40.2 | 55 | 61 |
饱和蒸气压/kPa | 8.3(20℃) | 7.9(25℃) | 37.77(25℃) | 24.8(25℃) | 38.4(25℃) |
黏度/(mPa·s) | 0.7(45℃) | 0.4(25℃ | 0.4(25℃) | 0.67(25℃) | 0.61(25℃) |
液体密度/(g/ml) | 1.58(21℃) | 1.25(21℃) | 1.263(21℃) | 1.58(21℃) | 1.52(21℃) |
汽化潜热/(kJ/kg) | 144.21 | 234.50 | 176.81 | 129.58 | 125.82 |
比热容/(J/(g·℃)) | 1.21 | 1.17 | 1.46 | 1.13 | 1.18 |
表面张力/(mN/m) | 18(45℃) | 18.7(20℃) | 15(20℃) | 14.1(25℃) | 13.6(25℃) |
KB值 | 14 | 56 | 13 | 12 | 10 |
可接受暴露局限/(mg/kg),8h/12h | 123 | 500 | 1000 | 200 | 750 |
燃烧下限/ % (vol) | 无(常温) | 无 | 无 | 无 | 无 |
闪点/℃ | 无 | 无 | -27 | 无 | 无 |
可燃性 | 不可燃 | 不可燃 | 可燃 | 不可燃 | 不可燃 |
ODP值 | 0 | 0.11 | 0 | 0 | 0 |
大气寿命/a | 3.4 | 9.4 | 8.7 | 16.1 | 4.7 |
GWP100值 | 195 | 630 | 804 | 1650 | 297 |
表1 各种清洗剂的基本性能[23]
Table 1 Basic properties of various cleaning agents[23]
项目 | F7A | HCFC-141b | HFC-365mfc | HFC-4310mee | HFE-449s1 |
---|---|---|---|---|---|
分子式 | C5H3F7 | C2H3Cl2F | C4H5F5 | C5H2F10 | C4F9OCH3 |
沸点/℃ | 82.5 | 32.05 | 40.2 | 55 | 61 |
饱和蒸气压/kPa | 8.3(20℃) | 7.9(25℃) | 37.77(25℃) | 24.8(25℃) | 38.4(25℃) |
黏度/(mPa·s) | 0.7(45℃) | 0.4(25℃ | 0.4(25℃) | 0.67(25℃) | 0.61(25℃) |
液体密度/(g/ml) | 1.58(21℃) | 1.25(21℃) | 1.263(21℃) | 1.58(21℃) | 1.52(21℃) |
汽化潜热/(kJ/kg) | 144.21 | 234.50 | 176.81 | 129.58 | 125.82 |
比热容/(J/(g·℃)) | 1.21 | 1.17 | 1.46 | 1.13 | 1.18 |
表面张力/(mN/m) | 18(45℃) | 18.7(20℃) | 15(20℃) | 14.1(25℃) | 13.6(25℃) |
KB值 | 14 | 56 | 13 | 12 | 10 |
可接受暴露局限/(mg/kg),8h/12h | 123 | 500 | 1000 | 200 | 750 |
燃烧下限/ % (vol) | 无(常温) | 无 | 无 | 无 | 无 |
闪点/℃ | 无 | 无 | -27 | 无 | 无 |
可燃性 | 不可燃 | 不可燃 | 可燃 | 不可燃 | 不可燃 |
ODP值 | 0 | 0.11 | 0 | 0 | 0 |
大气寿命/a | 3.4 | 9.4 | 8.7 | 16.1 | 4.7 |
GWP100值 | 195 | 630 | 804 | 1650 | 297 |
项目 | F8E | 四氟 甲烷 | 六氟 乙烷 | 八氟 环丁烷 |
---|---|---|---|---|
分子式 | C5F8 | CF4 | C2F6 | C4F8 |
ODP值 | 0 | 0 | 0 | 0 |
GWP100值 | 90 | 6630 | 11000 | 9540 |
大气寿命/a | 1 | 50000 | 10000 | 3200 |
对SiO2刻蚀速率/(nm/min) | 176[ | — | — | 272[ |
对SiO2/基底的刻蚀选择比 | 3.78[ | 较差 | 较差 | 2.00[ |
表2 各种刻蚀剂的基本性能
Table 2 Basic properties of various etching agents
项目 | F8E | 四氟 甲烷 | 六氟 乙烷 | 八氟 环丁烷 |
---|---|---|---|---|
分子式 | C5F8 | CF4 | C2F6 | C4F8 |
ODP值 | 0 | 0 | 0 | 0 |
GWP100值 | 90 | 6630 | 11000 | 9540 |
大气寿命/a | 1 | 50000 | 10000 | 3200 |
对SiO2刻蚀速率/(nm/min) | 176[ | — | — | 272[ |
对SiO2/基底的刻蚀选择比 | 3.78[ | 较差 | 较差 | 2.00[ |
项目 | PE-1 | PE-2 | PE-3 | FC-43 | FC-70 |
---|---|---|---|---|---|
分子式 | C10F17N | C9F15N | C9F15NO | C12F27N | C15F33N |
ODP值 | 0 | 0 | 0 | 0 | 0 |
GWP100值 | 416 | — | — | >5000 | >5000 |
倾点/℃ | -34 | -33 | -49 | -50 | -25 |
介电常数(1 kHz) | 1.98 | — | — | 1.90 | 1.98 |
表3 环骨架的不饱和含氟胺与全氟烷基胺的基本性能
Table 3 Basic properties of unsaturated fluoroamines with ring skeletons, and perfluoroalkylamine
项目 | PE-1 | PE-2 | PE-3 | FC-43 | FC-70 |
---|---|---|---|---|---|
分子式 | C10F17N | C9F15N | C9F15NO | C12F27N | C15F33N |
ODP值 | 0 | 0 | 0 | 0 | 0 |
GWP100值 | 416 | — | — | >5000 | >5000 |
倾点/℃ | -34 | -33 | -49 | -50 | -25 |
介电常数(1 kHz) | 1.98 | — | — | 1.90 | 1.98 |
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